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Proceedings Paper

DfM, the teenage years
Author(s): Lars Liebmann
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Paper Abstract

To quantify current DfM value and future DfM potential, a mathematical framework to compare the DfM opportunity of present and future technology nodes is derived. Parallels are drawn between the evolution of DfM and the transition from 'soft RET' to 'hard RET'. DfM accomplishments in the current 'soft DfM' era are presented as compiled from a DfM workshop held by IBM's technology development partners. IBM's vision of profitable CMOS scaling in the era of 'hard DfM' is presented and its core computational technology elements are discussed. Feasibility demonstrations of key technical elements are reviewed. The paper shows that current technology nodes benefit from the emergence of integrated DfM solutions that provide incremental yet hard to quantify yield and performance benefits but also argues that DfM's role will continue to grow as computational scaling replaces physical scaling in the not to distant future.

Paper Details

Date Published: 19 March 2008
PDF: 14 pages
Proc. SPIE 6925, Design for Manufacturability through Design-Process Integration II, 692502 (19 March 2008); doi: 10.1117/12.782650
Show Author Affiliations
Lars Liebmann, IBM Microelectronics (United States)

Published in SPIE Proceedings Vol. 6925:
Design for Manufacturability through Design-Process Integration II
Vivek K. Singh; Michael L. Rieger, Editor(s)

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