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Proceedings Paper

A multipoint diffraction strain sensor using a micro-lens array: from theory to application
Author(s): Jun Wang; Anand Asundi
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Paper Abstract

The single point Optical Diffraction Strain Sensor has been extended to a patent-pending Multipoint Diffraction Strain Sensor (MDSS) using a microlens array. The system was further extended for strain measurement with variable sensitivity and measurement range. In this paper, the MDSS is shown to measure both tilt and non-uniform strain with a sensitivity of 0.41 mε/pixel and 4.7 mrad/pixel respectively. As validation the strain measured by the MDSS is compared with that by a micro-moiré interferometer with a Gabor filtering method for fringe pattern analysis, while the tilt is compared with derivatives of the surface profile measured by a confocal microscope.

Paper Details

Date Published: 25 April 2008
PDF: 8 pages
Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 69950N (25 April 2008); doi: 10.1117/12.782614
Show Author Affiliations
Jun Wang, Nanyang Technological Univ. (Singapore)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 6995:
Optical Micro- and Nanometrology in Microsystems Technology II
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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