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Proceedings Paper

Solution to improving certain kinds of focusing and leveling measurement system
Author(s): Guan Jun
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Paper Abstract

A solution to the improvement of certain kinds of FLMS (Focusing and Leveling Measurement System) is presented in this article. This solution can make FLMS, especially the FLMS which bases on detecting light energy barycenter or peak of probing spots (DLEBP-FLMS), only sensitive to the movement and topology of the object to be measured and immune to those optical characteristics of the measured object and FLMS itself (OCMOFI) which will introduce errors into FLMS measurement. Also this solution can balance all the energy distribution deviations introduced by FLMS itself, which are due to optical noncentrosymmetrical aberrations of its optics subsystem, to enhance the DLEBP-FLMS linearity and repeatability consequently. Therefore, measurement accuracy, reproducibility, adaptability to measured object, linearity and repeatability of certain kinds of FLMS can be improved by this solution.

Paper Details

Date Published: 19 November 2007
PDF: 10 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240M (19 November 2007); doi: 10.1117/12.782571
Show Author Affiliations
Guan Jun, Shanghai Micro Electronics Equipment Co. Ltd. (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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