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Proceedings Paper

Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer
Author(s): Xin Tan; Ying Liu; Zheng-kun Liu; Shao-jun Fu
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Paper Abstract

We present new progress of the diffraction grating interferometer being pre-aligned used a double frequency grating. To measure the parallelism of the double frequency grating to a nicety before being built in the interferometer, a device based on Diffraction Technique for measuring the parallelism of the double frequency grating is designed. It is built of a semiconductor laser, a collimator, gratings, a precision turnplate, a beeline workbench, a redressal shelves, a ccd detector. The system error of the device is analyzed in this paper, and the parallelism of the double frequency grating is measured by this device. The results demonstrate that the diffraction measuring device suits the parallelism measured the diffracting grating interferometer based on the double frequency grating of that parallelism can attain a high pre-aligning precision.

Paper Details

Date Published: 19 November 2007
PDF: 5 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240J (19 November 2007); doi: 10.1117/12.782518
Show Author Affiliations
Xin Tan, National Synchrotron Radiation Lab. (China)
Ying Liu, National Synchrotron Radiation Lab. (China)
Zheng-kun Liu, National Synchrotron Radiation Lab. (China)
Shao-jun Fu, National Synchrotron Radiation Lab. (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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