Share Email Print
cover

Proceedings Paper

Analysis and optimization for effective diffraction area of grating movable light modulator
Author(s): Lei Han; Shanglian Huang; Zhihai Zhang; Jie Zhang; Xu Yan
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

GMLM (Grating Movable Light Modulator)is a novel light modulator based on MOEMS technology which can be used in fields of display and print. But present design has only 30% effective diffraction area, which can deeply influence the key parameters such as pixel-filling-ratio and contrast. An electromechanical model of the device was established, and the effective spring constant of GMLM was deduced by energy method. According to that the relation between structure parameters and effective diffraction area was analyzed theoretically. Then optimized structures were simulated and validated by FEM software Coveter Ware. Simulation data shows that the optimization device model can enhance the effective diffraction area to about 90% from less than 30% before optimization.

Paper Details

Date Published: 19 November 2007
PDF: 7 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240C (19 November 2007); doi: 10.1117/12.782501
Show Author Affiliations
Lei Han, Chongqing Univ. (China)
Shanglian Huang, Chongqing Univ. (China)
Zhihai Zhang, Chongqing Univ. (China)
Jie Zhang, Chongqing Univ. (China)
Xu Yan, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

© SPIE. Terms of Use
Back to Top