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Proceedings Paper

Microfabrication of all-polymer capacitors for electronics
Author(s): Shuping Wang; Bradley W. Borden; Richard Li
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Paper Abstract

All-polymer capacitors are fabricated using the laser direct pattering combined with a novel lifting procedure. This parallel plate capacitor is achieved by using a highly doped silicon wafer and poly(3,4-ethylenedioxythiophene) as the electrodes and Norland Optical Adhesive 61 as the dielectric material. The resulting polymeric capacitor is characterized and analyzed for suitability in electronic circuits. The method offers an attractive processing technique as it does not require high temperatures, the need of a vacuum environment, or masks, providing a low cost prototyping with quick turn around time in the design and realization of capacitors that have applications in all polymer IC technology.

Paper Details

Date Published: 19 November 2007
PDF: 5 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672406 (19 November 2007); doi: 10.1117/12.782457
Show Author Affiliations
Shuping Wang, Univ. of North Texas (United States)
Bradley W. Borden, Univ. of North Texas (United States)
Richard Li, Univ. of North Texas (United States)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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