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Proceedings Paper

Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors
Author(s): Xiaohui Xu; Jiaru Chu
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Paper Abstract

The paper describes the design, modeling and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors. Both the analytical model and finite element method are employed for performance simulation and structure optimization of the bulk PZT actuator. According to the simulation results, thick PZT films with high d31 piezoelectric coefficient are necessary for the deformable mirrors to obtain both high stiffness and large stroke at low voltage for applications in astronomical observation and retina imaging. The fabrication techniques for bulk PZT actuators for MEMS deformable mirrors are investigated, incorporating the bonding of bulk PZT ceramics to Si single crystals with epoxy resin, the thinning and patterning of bulk PZT ceramics using wet-etching method. 1BHF:2HCl:4NH4Cl:4H2O solution was used as the etchant. Using the fabrication techniques, we have successfully demonstrated a 4×4 prototype array of 2.5mm-diameter bulk PZT actuators for MEMS deformable mirrors. The bulk PZT actuators show a stroke of 3 μm at ±25V and displacement hysteresis of 15%. The displacement hysteresis was largely eliminated by using the method of staying on the same segment.

Paper Details

Date Published: 19 November 2007
PDF: 10 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672403 (19 November 2007); doi: 10.1117/12.782453
Show Author Affiliations
Xiaohui Xu, Univ. of Science and Technology of China (China)
Jiaru Chu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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