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Proceedings Paper

Digital holography in combination with diffraction grating to get super-resolution
Author(s): M. Paturzo; F. Merola; S. Grilli; S. De Nicola; P. Ferraro
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Paper Abstract

Resolution is an important issue in inspection of objects on microscopic scale. Various approaches have been investigated to increase the optical resolution behind the diffraction limit of an optical imaging system. Demonstration that super-resolution is possible have been also established in interference microscopy. We have studied the possibility to use diffraction gratings, in different experimental configurations for increasing the aperture of an optical imaging system. The aim of the study is to demonstrate that super-resolution is possible and is a practical and viable method for a coherent optical microscope. We take benefit of the numerical reconstruction properties of DH in combination with diffraction grating to get super-resolution. Various attempts have been performed and results are presented and discussed. The approaches could be used for metrology and imaging application in various fields of engineering and biology.

Paper Details

Date Published: 20 May 2008
PDF: 8 pages
Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 699505 (20 May 2008); doi: 10.1117/12.782111
Show Author Affiliations
M. Paturzo, Istituto Nazionale di Ottica Applicata (Italy)
F. Merola, Istituto Nazionale di Ottica Applicata (Italy)
S. Grilli, Istituto Nazionale di Ottica Applicata (Italy)
S. De Nicola, Istituto di Cibernetica Eduardo Caianiello (Italy)
P. Ferraro, Istituto Nazionale di Ottica Applicata (Italy)


Published in SPIE Proceedings Vol. 6995:
Optical Micro- and Nanometrology in Microsystems Technology II
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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