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Proceedings Paper

A compound microfluidic device with integrated optical waveguides
Author(s): Timo Mappes; Jürgen Mohr; Kristin Mandisloh; Mauno Schelb; Benjamin Ross
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Paper Abstract

The integration of optical components in microfluidic devices is an emerging issue for downscaling analytical processes to lab-on-a-chip systems. Our approach is to build a one compound polymer system, which combines optical waveguides with microfluidic channels in one monolithic device. In addition the entire chip shall be optimized to use optical interfaces only. The processing of channels and waveguides is based on photodegradation of PMMA through deep ultraviolet (DUV) radiation in both cases. In a first step, microfluidic trenches with a depth of 5 μm are structured by DUV lithography with a subsequent developing process dissolving the exposed material. Waveguides, geometrically crossing the channel, get implemented by a second DUV lithography step. In a last step, the transparent optofluidic devices are covered to form channels and sealed with a second PMMA substrate by thermal bonding. The process was optimized to achieve leakage free channels without any disturbance of the waveguide behaviour. The paper discusses the manufacturing process and shows experimental results that serve as preparation for ongoing simulations for sensing applications. In first experiments the optical attenuation of the waveguides decreased by 1.2 dB at a wavelength of λ = 638 nm, when the empty channels were filled with deionised water which corresponds to a change in the refractive index of 0.33.

Paper Details

Date Published: 14 May 2008
PDF: 6 pages
Proc. SPIE 6992, Micro-Optics 2008, 69920L (14 May 2008); doi: 10.1117/12.781820
Show Author Affiliations
Timo Mappes, Univ. Karlsruhe (Germany)
Jürgen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Kristin Mandisloh, Forschungszentrum Karlsruhe GmbH (Germany)
Mauno Schelb, Univ. Karlsruhe (Germany)
Benjamin Ross, Univ. Karlsruhe (Germany)

Published in SPIE Proceedings Vol. 6992:
Micro-Optics 2008
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Mohammad R. Taghizadeh, Editor(s)

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