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Proceedings Paper

Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing
Author(s): Willem Hoving; Rene Heideman; Douwe Geuzebroek; Arne Leinse; Edwin Klein; Ronald Dekker
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Paper Abstract

A new class of integrated optical waveguide structures ("TriPleX") is presented, based on low cost CMOS-compatible LPCVD processing of alternating Si3N4 and SiO2 layers. The technology allows for medium and high index-contrast waveguides that exhibit low channel attenuation. In addition, TriPleX waveguides are suitable for operation at wavelengths from visible (< 500 nm) through the infra-red range (2 μm and beyond). The geometry is basically formed by a rectangular cross-section of silicon nitride (Si3N4) filled with and encapsulated by silicon dioxide (SiO2). The birefringence and minimal bend radius of the waveguide are completely controlled by the geometry of the waveguide layer structures. Experiments on typical geometries show excellent characteristics for telecom wavelengths at ~1300 nm-1600 nm (channel attenuation ≤ 0.06 dB/cm, Insertion Loss (IL) ≤ 0.15 dB, Polarization Dependent Loss (PDL) ≤ 0.1 dB, Group Birefringence (Bg) << 1×10-4, bend radius ≤ 50-100 μm).

Paper Details

Date Published: 1 May 2008
PDF: 6 pages
Proc. SPIE 6996, Silicon Photonics and Photonic Integrated Circuits, 699612 (1 May 2008); doi: 10.1117/12.781700
Show Author Affiliations
Willem Hoving, XiO Photonics bv (Netherlands)
Rene Heideman, LioniX bv (Netherlands)
Douwe Geuzebroek, XiO Photonics bv (Netherlands)
Arne Leinse, LioniX bv (Netherlands)
Edwin Klein, XiO Photonics bv (Netherlands)
Ronald Dekker, XiO Photonics bv (Netherlands)


Published in SPIE Proceedings Vol. 6996:
Silicon Photonics and Photonic Integrated Circuits
Giancarlo C. Righini; Seppo K. Honkanen; Lorenzo Pavesi; Laurent Vivien, Editor(s)

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