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Proceedings Paper

MEMS deformable mirrors for space and defense applications
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Paper Abstract

This paper presents recent progress in the development of MEMS deformable mirrors for space and defense applications. Two different MEMS DM designs are described, along with their corresponding uses in space and defense systems. The designs build on a conventional surface micromachining technology and feature an electrostatic actuation architecture pioneered at Boston University. Key performance characteristics are presented. The device characteristics make them useful for a range of wavefront control applications that include low-power optical modulation, adaptive optics imaging, and laser communication, on both ground-based and space-based platforms.

Paper Details

Date Published: 30 April 2008
PDF: 7 pages
Proc. SPIE 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II, 695914 (30 April 2008); doi: 10.1117/12.781676
Show Author Affiliations
T. G. Bifano, Boston Univ. (United States)
Boston Micromachines Corp. (United States)
Paul Bierden, Boston Micromachines Corp. (United States)
Steven A. Cornelissen, Boston Micromachines Corp. (United States)


Published in SPIE Proceedings Vol. 6959:
Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
Thomas George; Zhongyang Cheng, Editor(s)

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