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Proceedings Paper

Optical sensing of chemicals by a porous silicon Bragg grating waveguide
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Paper Abstract

A direct laser writing process has been exploited to fabricate a high order Bragg grating on the surface of a porous silicon slab waveguide. The transmission spectrum of the structure, characterized by a pitch of 10 µm, has been investigated by end-fire coupling on exposure to vapor substances of environmental interest. The analyte molecules substitute the air into the silicon pores, due to the capillary condensation phenomenon, and the transmitted spectrum of the grating shifts towards higher wavelengths. The experimental results have been compared with the theoretical calculations obtained by using the transfer matrix method together with the slab waveguide modal calculation.

Paper Details

Date Published: 28 April 2008
PDF: 5 pages
Proc. SPIE 7003, Optical Sensors 2008, 70031E (28 April 2008); doi: 10.1117/12.781249
Show Author Affiliations
Ilaria Rea, Institute for Microelectronics and Microsystems, CNR (Italy)
Univ. of Naples Federico II (Italy)
Mario Iodice, Institute for Microelectronics and Microsystems, CNR (Italy)
Giuseppe Coppola, Institute for Microelectronics and Microsystems, CNR (Italy)
Ivo Rendina, Institute for Microelectronics and Microsystems, CNR (Italy)
Edoardo De Tommasi, Institute for Microelectronics and Microsystems, CNR (Italy)
Luca De Stefano, Institute for Microelectronics and Microsystems, CNR (Italy)


Published in SPIE Proceedings Vol. 7003:
Optical Sensors 2008
Francis Berghmans; Anna Grazia Mignani; Antonello Cutolo; Patrick P. Meyrueis; Thomas P. Pearsall, Editor(s)

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