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Proceedings Paper

Fabrication of polymer micro-optical components for integration in silicon MOEMS
Author(s): D. Cristea; P. Obreja; M. Kusko; M. Purica; A. Dinescu; A. Herrero; Dan Apostol; E. Manea
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Paper Abstract

This paper reports fabrication methods of polymer-based micro/nano optical structures based on replica molding. Various molds have been used: polymer, silicon, and SiO2-based. Different types of treatment and release agent were investigated in order to achieve an optimum demolding. Diffractive optical elements, micro-lenses and antireflective layers have been obtained in commercial or doped polymers with controlled refractive index. The quality of the replication was investigated using optical microscopy, SEM, profilometry and functional tests. The micro-optical components can be transferred onto silicon silicon chip with photodetectors, or photonic integrated circuits using microtransfer molding.

Paper Details

Date Published: 25 April 2008
PDF: 10 pages
Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699307 (25 April 2008); doi: 10.1117/12.781067
Show Author Affiliations
D. Cristea, National Institute for Research and Development in Microtechnologies (Romania)
P. Obreja, National Institute for Research and Development in Microtechnologies (Romania)
M. Kusko, National Institute for Research and Development in Microtechnologies (Romania)
M. Purica, National Institute for Research and Development in Microtechnologies (Romania)
A. Dinescu, National Institute for Research and Development in Microtechnologies (Romania)
A. Herrero, Fundación TEKNIKER (Spain)
Dan Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
E. Manea, National Institute for Research and Development in Microtechnologies (Romania)


Published in SPIE Proceedings Vol. 6993:
MEMS, MOEMS, and Micromachining III
Hakan Urey, Editor(s)

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