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Proceedings Paper

AlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength range
Author(s): Pawel E. Malinowski; Joachim John; Anne Lorenz; Patricia Aparicio Alonso; Marianne Germain; Joff Derluyn; Kai Cheng; Gustaaf Borghs; Robert Mertens; Jean Yves Duboz; Fabrice Semond; J.-F. Hochedez; A. BenMoussa
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Paper Abstract

We report on the fabrication of Schottky-diode-based Extreme UltraViolet (EUV) photodetectors. The devices were processed on Gallium Nitride (GaN) layers epitaxially grown on 4 inch Silicon (111) substrates by Metal-Organic Chemical Vapor Deposition (MOCVD). Cutoff wavelength was determined together with the spectral responsivity measurements in the Near UltraViolet (NUV) range (200nm to 400nm). Absolute spectral responsivity measurements were performed in the EUV range (5nm to 20nm) with the synchrotron radiation using the facilities of Physikalisch- Technische Bundesanstalt (PTB), located at Berliner Elektronenspeicherring-Gesellschaft fuer Synchrotronstrahlung (BESSY). The described work is done in the framework of the Blind to Optical Light Detectors (BOLD) project supported by the European Space Agency (ESA).

Paper Details

Date Published: 26 April 2008
PDF: 8 pages
Proc. SPIE 7003, Optical Sensors 2008, 70030N (26 April 2008); doi: 10.1117/12.780948
Show Author Affiliations
Pawel E. Malinowski, Interuniversity MicroElectronics Ctr. (Belgium)
Katholieke Univ. Leuven (Belgium)
Joachim John, Interuniversity MicroElectronics Ctr. (Belgium)
Anne Lorenz, Interuniversity MicroElectronics Ctr. (Belgium)
Katholieke Univ. Leuven (Belgium)
Patricia Aparicio Alonso, Interuniversity MicroElectronics Ctr. (Belgium)
Marianne Germain, Interuniversity MicroElectronics Ctr. (Belgium)
Joff Derluyn, Interuniversity MicroElectronics Ctr. (Belgium)
Kai Cheng, Interuniversity MicroElectronics Ctr. (Belgium)
Gustaaf Borghs, Interuniversity MicroElectronics Ctr. (Belgium)
Robert Mertens, Interuniversity MicroElectronics Ctr. (Belgium)
Katholieke Univ. Leuven (Belgium)
Jean Yves Duboz, Ctr. de Recherche sur l'Hétéro-Epitaxie et ses Applications (France)
Fabrice Semond, Ctr. de Recherche sur l'Hétéro-Epitaxie et ses Applications (France)
J.-F. Hochedez, Royal Observatory of Belgium (Belgium)
A. BenMoussa, Royal Observatory of Belgium (Belgium)


Published in SPIE Proceedings Vol. 7003:
Optical Sensors 2008
Francis Berghmans; Anna Grazia Mignani; Antonello Cutolo; Patrick P. Meyrueis; Thomas P. Pearsall, Editor(s)

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