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Proceedings Paper

Inorganic color filters by MOCVD for CMOS imager and colorimetry
Author(s): Samir Guerroudj; François Roy; Jean-Luc Deschanvres
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Paper Abstract

A set of three thin films transmitting in the red, green and blue wavelengths have been demonstrated by the MOCVD aerosol technology. These thin films were elaborated with different organometallic precursors and deposited on glass or fused silica at different temperatures in the range of 350°C-550°C.The physicochemical characteristics enable us to observe the phases responsible for the color. The red one filter consists of a thin film of hematite-Fe2O3 with a transmittance peak of 75% at 630 nm. The green thin film is composed of Cobalt doped ZnO with a transmittance peak of 56% at 540nm. The blue thin film is composed of Cobalt doped Al2O3 with a transmittance peak of 65% at 450nm. Moreover, the absorbance spectra properties are discussed related to the physicochemical characteristics of the deposited films. Then, thanks to the best triplet we can evaluate the color reconstruction. Using a set of spectral files, a "color toolbox" software optimizes by the method of least squares the 3 by 3 color matrix, the white balance and the offset.

Paper Details

Date Published: 30 April 2008
PDF: 12 pages
Proc. SPIE 7001, Photonics in Multimedia II, 700109 (30 April 2008); doi: 10.1117/12.780546
Show Author Affiliations
Samir Guerroudj, STMicroelectronics (France)
Minatec (France)
François Roy, STMicroelectronics (France)
Jean-Luc Deschanvres, Minatec (France)

Published in SPIE Proceedings Vol. 7001:
Photonics in Multimedia II
Ari Tervonen; Frank Möllmer, Editor(s)

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