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Proceedings Paper

A novel method for fabricating an optical grating element with a fine grating pitch
Author(s): Kuo-Chi Chiu; Sheng-Li Chang; Ming-Fang Hsu
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Paper Abstract

Optical encoders are widely used to detect the position, angle or speed in precise control systems. A rotary optical encoder mainly comprises an optical sensor and an optical grating element with a fine grating pitch. In order to improve the resolution of rotary optical encoders, the grating pitch in the optical grating element should be reduced as small as possible. That is, the pulse per revolution (ppr) in the optical grating element must be increased markedly. However, an optical grating element having over 10,000 ppr is difficult to achieve by traditional methods. In this paper, a novel method is proposed and demonstrated to replicate an optical grating element with a high ppr. Furthermore, the tiny signals generated from fine grating pitches in the optical grating element have been also measured by using a conventional optical pickup head.

Paper Details

Date Published: 14 May 2008
PDF: 6 pages
Proc. SPIE 6992, Micro-Optics 2008, 699212 (14 May 2008); doi: 10.1117/12.780460
Show Author Affiliations
Kuo-Chi Chiu, Industrial Technology Research Institute (Taiwan)
Sheng-Li Chang, Industrial Technology Research Institute (Taiwan)
Ming-Fang Hsu, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 6992:
Micro-Optics 2008
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Mohammad R. Taghizadeh, Editor(s)

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