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Proceedings Paper

Design and characteristics of piezoelectric actuator with single neuron adaptive PID controller for the grating tiling
Author(s): Bin Wang; Yong Wang; Jifeng Zu; Jianqiang Zhu
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Paper Abstract

In this paper we propose a system with the piezoelectric actuator by the single neuron adaptive PID controller for the grating tiling. Then the design of the control system as well as the control method by considering the nonlinearity of piezoelectric actuators is discussed. At last, close loop position examinations by the capacitive displacement sensor with nanometer scale precision are performed. The experimental results indicate that the system is working effectively. The system is provided with the characters of self-learning, easy calculating and adaptability as well as of a simple structure.

Paper Details

Date Published: 1 November 2007
PDF: 6 pages
Proc. SPIE 6423, International Conference on Smart Materials and Nanotechnology in Engineering, 64233E (1 November 2007); doi: 10.1117/12.780060
Show Author Affiliations
Bin Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Yong Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Jifeng Zu, Shanghai Institute of Optics and Fine Mechanics (China)
Jianqiang Zhu, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6423:
International Conference on Smart Materials and Nanotechnology in Engineering

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