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Proceedings Paper

Chip scale integrated microresonators for sensing applications
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Paper Abstract

Miniaturized, portable sensing systems for medical and environmental diagnostics and monitoring are an excellent application area for microresonator sensors. Polymer microresonators are attractive components for chip scale integrated sensing because they can be integrated in a planar format using standard semiconductor manufacturing technologies. Vertically coupled microresonators, where the waveguides lie below or above the microresonator, can be fabricated using standard photolithography, enabling low cost integrated sensor systems. Microresonators can be surface customized for discrimination in, for example, chemical sensing applications, or the surface can be functionalized for biological sensing applications. To create chip scale integrated sensing systems, microresonators can be integrated with planar optical system components, such as polymer waveguides and thin film photodetectors, onto silicon using heterogeneous integration. Heterogeneous integration can also be used to integrate optical sources with sensors onto host substrates such as silicon.

Paper Details

Date Published: 7 February 2008
PDF: 14 pages
Proc. SPIE 6872, Laser Resonators and Beam Control X, 68720Q (7 February 2008); doi: 10.1117/12.779895
Show Author Affiliations
Nan M. Jokerst, Duke Univ. (United States)
Sang-Yeon Cho, New Mexico State Univ. (United States)
Lin Luan, Duke Univ. (United States)
Matthew Royal, Duke Univ. (United States)
Sabarni Palit, Duke Univ. (United States)


Published in SPIE Proceedings Vol. 6872:
Laser Resonators and Beam Control X
Alexis V. Kudryashov; Alan H. Paxton; Vladimir S. Ilchenko, Editor(s)

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