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Proceedings Paper

Carbon nanotube vacuum gauges utilizing long, dissipative tubes
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Paper Abstract

A carbon nanotube-based thermal conductivity vacuum gauge is described which utilizes 5-10 μm long diffusively contacted SWNTs for vacuum sensing. By etching the thermal SiO2 beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward higher vacuums. The pressure response of unannealed and annealed devices was compared to that of released devices. The released devices showed sensitivity to pressure as low as 1 x 10-6 Torr. The sensitivity increased more dramatically with power for the released device compared to that of the unreleased device. Low temperature electronic transport measurements of the tubes were suggestive of a thermally activated hopping mechanism where the activation energy for hopping was calculated to be ~ 39 meV.

Paper Details

Date Published: 30 April 2008
PDF: 8 pages
Proc. SPIE 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II, 69590F (30 April 2008); doi: 10.1117/12.779570
Show Author Affiliations
Anupama B. Kaul, Jet Propulsion Lab. (United States)
Harish M. Manohara, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 6959:
Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
Thomas George; Zhongyang Cheng, Editor(s)

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