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Proceedings Paper

Design, simulation, and fabrication of a silicon micro flat heat pipe with axial triangle grooves
Author(s): Xiaowei Liu; Lei Xu; Xin Xin; Mingxue Huo
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Paper Abstract

The design, numerical simulation and fabrication process of a silicon micro flat heat pipe with axially micromachining triangle grooves are discussed. In this paper the structure of a silicon micro flat heat pipe is presented firstly. Then numerical simulation is undertaken to evaluate the thermal performance of micro flat heat pipe. Using MATLAB a one-dimensional model is developed and solved numerically to investigate the flow of liquid and vapor in triangle grooves. The effect of interfacial and vapor shear stress is considered in the model. The results obtained from this simulation contain axial variation of pressure difference between vapor and liquid, velocity of liquid and vapor and film thickness. In addition maximum heat transport capacity of MHP is calculated. The results predicted by the model are compared with the published results in literature and show good agreement. These numerical results are used to determine the structural parameters of final prototypes. Finally a silicon/methanol prototype was fabricated to demonstrate the feasibility of heat spreading using this type of MHP. The MHP grooves capped by a glass wafer were fabricated by using bulk micromachining and anode bonding techniques. Detailed fabrication process of a silicon micro flat heat pipe with axial triangle grooves is presented.

Paper Details

Date Published: 1 November 2007
PDF: 7 pages
Proc. SPIE 6423, International Conference on Smart Materials and Nanotechnology in Engineering, 642309 (1 November 2007); doi: 10.1117/12.779210
Show Author Affiliations
Xiaowei Liu, Harbin Institute of Technology (China)
Lei Xu, Harbin Institute of Technology (China)
Xin Xin, Harbin Institute of Technology (China)
Mingxue Huo, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 6423:
International Conference on Smart Materials and Nanotechnology in Engineering

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