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Proceedings Paper

Effect of geometry on thermoelastic damping in MEMS
Author(s): Yun-Bo Yi
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Paper Abstract

The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonators are investigated numerically using a finite element formulation. The perturbation analysis is applied to derive a linear eigenvalue equation for the exponentially decaying rate of the mechanical oscillation. The analysis also involves a Fourier method that reduces the dimensionality of the problem and considerably improves the computational efficiency. The method is first validated by comparing the two-dimensional model to the existing analytical solutions for a simply supported beam system, and then it is extended to a three-dimensional axisymmetric geometry to obtain the energy loss as a function of the geometric parameters in a silicon ring resonator. The computational results reveal that there is a peak value for the resonant frequency when the radial width of the ring varies. In addition, the quality factor (Q-factor) decreases with the radial width as a monotonic function.

Paper Details

Date Published: 1 November 2007
PDF: 8 pages
Proc. SPIE 6423, International Conference on Smart Materials and Nanotechnology in Engineering, 642307 (1 November 2007); doi: 10.1117/12.779199
Show Author Affiliations
Yun-Bo Yi, Univ. of Denver (United States)

Published in SPIE Proceedings Vol. 6423:
International Conference on Smart Materials and Nanotechnology in Engineering
Shanyi Du; Jinsong Leng; Anand K. Asundi, Editor(s)

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