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Proceedings Paper

Fabrication and characterization of a thermo-mechanically tunable grating-assisted suspended waveguide filter
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Paper Abstract

A silicon-on-insulator (SOI) rib waveguide integrated with a Bragg grating and nickel chromium heating elements has been fabricated. The heaters enable tuning of the Bragg wavelength through a thermo-optic effect. As the temperature is increased, the Bragg wavelength also increases due to the increasing silicon refractive index and effective mode index of the guide. The device is designed so that an additional processing step can remove the buried oxide beneath the grating to form a suspended waveguide. This structure would further decrease the power input required to tune the filter, and would allow the waveguide to buckle at a critical temperature. In this work the un-released structure is fabricated and mounted in a standard dual in-line pin (DIP) package to allow optical and electrical characterization. Test results demonstrating thermo-optic tuning show a 1 nm shift in Bragg wavelength with a power input of 58 mW.

Paper Details

Date Published: 13 February 2008
PDF: 9 pages
Proc. SPIE 6898, Silicon Photonics III, 68981E (13 February 2008); doi: 10.1117/12.778779
Show Author Affiliations
C. R. Raum, Carleton Univ. (Canada)
R. N. Tait, Carleton Univ. (Canada)
R. C. Gauthier, Carleton Univ. (Canada)


Published in SPIE Proceedings Vol. 6898:
Silicon Photonics III
Joel A. Kubby; Graham T. Reed, Editor(s)

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