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Proceedings Paper

Multilayer biochips with integrated optics replicated in PMMA and PDMS
Author(s): H. Hosseinkhannazer; L. Kostiuk; J. N. McMullin
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Paper Abstract

This paper describes the development of multi-level lab-on-a-chip devices that use integrated optics to reduce the size and cost of portable dual-function analysis systems. Silicon/polymer and all-polymer devices were fabricated that have separate optics and fluidics layers that are bonded together. The optical layer has hollow v-groove waveguides in anisotropically etched silicon or in polymethylmethacrylate (PMMA) that is replicated from the silicon in a two-step replication procedure using polyvinyl alcohol (PVA) as an intermediate negative replica. Light from hollow v-groove waveguides in the optical layer is coupled to the fluidic layer by reflection from metallized reflective planes. The fluidic layer is constructed of polydimethylsiloxane (PDMS) in a two-step positive replication procedure from a micromachined glass master. A thin intermediate PMMA layer with reflective metal strips seals both the hollow optical waveguides and the PDMS microchannels.

Paper Details

Date Published: 26 October 2007
PDF: 7 pages
Proc. SPIE 6796, Photonics North 2007, 67960B (26 October 2007); doi: 10.1117/12.778515
Show Author Affiliations
H. Hosseinkhannazer, Univ. of Alberta (Canada)
L. Kostiuk, Univ. of Alberta (Canada)
J. N. McMullin, Univ. of Alberta (Canada)


Published in SPIE Proceedings Vol. 6796:
Photonics North 2007

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