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Proceedings Paper

Microfabrication of an integrated optical cell counter for cytometry application
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Paper Abstract

This paper presents the design and fabrication of an integrated cell counter for a MEMS flow cytometer. The imbedded out-of-plane micro lens in the cell counter is used to focus the fluorescent or scattering light emitting from the dyed cells into the output fiber to improve the optical detection efficiency. Both the optical cell counter device with imbedded micro-lens and the hydro-focusing unit of the micro flow cytometer were fabricated using a process based on UV lithography of SU-8 negative-tone photoresist. A novel microfabrication technology based on tilted UV-lithography and controlled exposure dosage and development time was performed to produce the out-of-plane micro lens. Out-of-plane micro lens with various pad sizes and focal lengths can be fabricated by carefully controlling the fabrication process. The microlens and the hydrofocusing unit were fabricated using the same mask. High alignment accuracy can therefore be achieved without any post-fabrication alignment processes.

Paper Details

Date Published: 12 February 2008
PDF: 6 pages
Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 68860H (12 February 2008); doi: 10.1117/12.778332
Show Author Affiliations
Guocheng Shao, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 6886:
Microfluidics, BioMEMS, and Medical Microsystems VI
Wanjun Wang; Claude Vauchier, Editor(s)

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