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Proceedings Paper

Pulsed laser ablation of polymers for display applications
Author(s): James E. A. Pedder; Andrew S. Holmes; Heather J. Booth
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Paper Abstract

Laser micromachining by ablation is a well established technique used for the production of 2.5D and 3D features in a wide variety of materials. The fabrication of stepped, multi-level, structures can be achieved using a number of binary mask projection techniques using excimer lasers. Alternatively, direct-writing of complex 2.5D features can easily be achieved with solid-state lasers. Excimer laser ablation using half-tone masks allows almost continuous surface relief and the generation of features with low surface roughness. We have developed techniques to create large arrays of repeating micro-optical structures on polymer substrates. Here, we show our recent developments in laser structuring with the combination of half-tone and binary mask techniques.

Paper Details

Date Published: 26 February 2008
PDF: 7 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790S (26 February 2008); doi: 10.1117/12.778180
Show Author Affiliations
James E. A. Pedder, Oerlikon Optics UK Ltd. (United Kingdom)
Andrew S. Holmes, Imperial College London (United Kingdom)
Heather J. Booth, Oerlikon Optics UK Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Andrew S. Holmes; Michel Meunier; Frank Träger; Craig B. Arnold; Jan J. Dubowski; Hiroyuki Niino, Editor(s)

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