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Proceedings Paper

Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator
Author(s): N. Topaloglu; C. Elbuken; P. M. Nieva; M. Yavuz; J. P. Huissoon
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Paper Abstract

In this paper we present the modeling and simulation of a 2 degree-of-freedom (DOF) bidirectional electrothermal actuator. The four arm microactuator was designed to move in both the horizontal and vertical axes. By tailoring the geometrical parameters of the design, the in-plane and out-of-plane motions were decoupled, resulting in enhanced mobility in both directions. The motion of the actuator was modeled analytically using an electro-thermo-mechanical analysis. To validate the analytical model, finite element simulations were performed using ANSYS. The microactuators were fabricated using PolyMUMPS process and experimental results show good agreement with both the analytical model and the simulations. We demonstrated that the 2-DOF bidirectional electrothermal actuator can achieve 3.7 μm in-plane and 13.3 μm out-of-plane deflections with an input voltage of 10 V.

Paper Details

Date Published: 3 April 2008
PDF: 12 pages
Proc. SPIE 6926, Modeling, Signal Processing, and Control for Smart Structures 2008, 692605 (3 April 2008); doi: 10.1117/12.776594
Show Author Affiliations
N. Topaloglu, Univ. of Waterloo (Canada)
C. Elbuken, Univ. of Waterloo (Canada)
P. M. Nieva, Univ. of Waterloo (Canada)
M. Yavuz, Univ. of Waterloo (Canada)
J. P. Huissoon, Univ. of Waterloo (Canada)


Published in SPIE Proceedings Vol. 6926:
Modeling, Signal Processing, and Control for Smart Structures 2008
Douglas K. Lindner, Editor(s)

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