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Proceedings Paper

An electro-mechanically coupled SDOF piezoelectric stack actuator model
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Paper Abstract

Piezoelectric actuators used in nano-positioning devices exhibit highly non-linear behavior and strong hysteresis, which limits the efficiency of conventional non-model-based controllers. This paper presents the first results of a free energy model based on the theory of thermal activation for single crystal piezoceramics that couples mechanical stress and electric field. It is capable of predicting the hysteretic behavior along with the frequency-dependence present in these materials. The model is then coupled with a spring as a first step toward a SDOF model of a commercial nano-positioning stage and is the basis for future control applications. Quasi-static simulations are presented to illustrate the effects of spring loading on the actuator behavior.

Paper Details

Date Published: 3 April 2008
PDF: 10 pages
Proc. SPIE 6926, Modeling, Signal Processing, and Control for Smart Structures 2008, 692608 (3 April 2008); doi: 10.1117/12.776345
Show Author Affiliations
Alexander York, North Carolina State Univ. (United States)
Stefan Seelecke, North Carolina State Univ. (United States)

Published in SPIE Proceedings Vol. 6926:
Modeling, Signal Processing, and Control for Smart Structures 2008
Douglas K. Lindner, Editor(s)

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