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Proceedings Paper

Ion-implanted compliant and patternable electrodes for miniaturized dielectric elastomer actuators
Author(s): Samuel Rosset; Muhamed Niklaus; Venjamin Stojanov; Arnaud Felber; Philippe Dubois; Herbert R. Shea
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Paper Abstract

This article presents metal ion implantation as an alternative technique to fabricate compliant electrodes for small-size dielectric elastomer actuators. When reducing the size of these actuators to below 1 cm, the ability to pattern the electrodes is added to the need for compliance. Metal ion implantation on Polydimethylsiloxane (PDMS) layers allows the creation of conductive and compliant electrodes, which can be easily defined by photolithography or with a shadow mask. Mechanical testing show that implantation has a limited impact on the PDMS' properties, with a Young's modulus increase of 50%-200% depending on the dose. Uniaxial stretching tests show that conductivity is conserved for strains up to 50% and present no hysteresis. Dielectric breakdown tests were conducted for Au and Pd implantations, which exhibited high breakdown fields (> 100V/μm), similar to non-implanted PDMS layers. Other advantages of ion implanted electrodes include transparency and a negligible mass. Buckling mode diaphragm actuators were fabricated with ion-implanted electrodes and exhibited out-of-plane displacements up to 7% of their lateral dimensions.

Paper Details

Date Published: 10 April 2008
PDF: 10 pages
Proc. SPIE 6927, Electroactive Polymer Actuators and Devices (EAPAD) 2008, 69270W (10 April 2008); doi: 10.1117/12.775727
Show Author Affiliations
Samuel Rosset, École Polytechnique Fédérale de Lausanne (Switzerland)
Muhamed Niklaus, École Polytechnique Fédérale de Lausanne (Switzerland)
Venjamin Stojanov, École Polytechnique Fédérale de Lausanne (Switzerland)
Arnaud Felber, École Polytechnique Fédérale de Lausanne (Switzerland)
Philippe Dubois, École Polytechnique Fédérale de Lausanne (Switzerland)
Herbert R. Shea, École Polytechnique Fédérale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 6927:
Electroactive Polymer Actuators and Devices (EAPAD) 2008
Yoseph Bar-Cohen, Editor(s)

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