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Proceedings Paper

Simulation of surface effects in energy dissipation of ultra-high-frequency (UHF) nanocantilevers
Author(s): Kun Yan; Ai-Kah Soh
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Paper Abstract

Devices composed of nanoelectromechanical systems (NEMS) possess distinguished properties which make them quite suitable for a variety of applications including ultra-high-frequency (UHF) resonators. However, most GHz resonators have low quality factor even though it has been well above 103 ~ 105 for very-high-frequency (VHF) microresonators. The motivation for our investigation of single crystal silicon nanoresonator arises from both its technological importance and its extraordinary surface effects. Our simulation results show that the quality factor decreased in a nearly linear manner as the surface area to volume ratio (SVR) was increased, which suggests that surface losses play a significant role in determining the quality factor of nanoresonators.

Paper Details

Date Published: 3 April 2008
PDF: 8 pages
Proc. SPIE 6926, Modeling, Signal Processing, and Control for Smart Structures 2008, 69260X (3 April 2008); doi: 10.1117/12.775386
Show Author Affiliations
Kun Yan, Univ. of Hong Kong (Hong Kong China)
Ai-Kah Soh, Univ. of Hong Kong (Hong Kong China)

Published in SPIE Proceedings Vol. 6926:
Modeling, Signal Processing, and Control for Smart Structures 2008
Douglas K. Lindner, Editor(s)

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