Share Email Print

Proceedings Paper

Laser microfabrication in industry - perspectives from the past, present and future
Author(s): Malcolm Gower
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper reviews the historical developments of laser microfabrication, highlights some of its current important industrial applications and takes a forward look at possible developments of the technology.

Paper Details

Date Published: 20 February 2008
PDF: 15 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687902 (20 February 2008); doi: 10.1117/12.774095
Show Author Affiliations
Malcolm Gower, Nanophoton Technologies (United Kingdom)

Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Andrew S. Holmes; Michel Meunier; Frank Träger; Craig B. Arnold; Jan J. Dubowski; Hiroyuki Niino, Editor(s)

© SPIE. Terms of Use
Back to Top