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Proceedings Paper

Laser microfabrication in industry - perspectives from the past, present and future
Author(s): Malcolm Gower
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Paper Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper reviews the historical developments of laser microfabrication, highlights some of its current important industrial applications and takes a forward look at possible developments of the technology.

Paper Details

Date Published: 20 February 2008
PDF: 15 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687902 (20 February 2008); doi: 10.1117/12.774095
Show Author Affiliations
Malcolm Gower, Nanophoton Technologies (United Kingdom)

Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Andrew S. Holmes; Michel Meunier; Frank Träger; Craig B. Arnold; Jan J. Dubowski; Hiroyuki Niino, Editor(s)

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