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Proceedings Paper

Advanced OPC and 2D verification for tip engineering using aggressive illuminations
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Paper Abstract

In this paper advanced OPC (Optical Proximity Correction) methods, additional with assistant features, and non-obvious methods were implemented to correct aberrations caused by aggressive illuminations in order to optimize the shape of the finger tips. OPC model and simulations were verified using 2D verification method.

Paper Details

Date Published: 1 April 2008
PDF: 7 pages
Proc. SPIE 6924, Optical Microlithography XXI, 69241H (1 April 2008); doi: 10.1117/12.773021
Show Author Affiliations
X. Zhang, Spansion, Inc. (United States)
T. Lukanc, Spansion, Inc. (United States)
H. Yang, Spansion, Inc. (United States)
B. Ward, Spansion, Inc. (United States)


Published in SPIE Proceedings Vol. 6924:
Optical Microlithography XXI
Harry J. Levinson; Mircea V. Dusa, Editor(s)

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