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Proceedings Paper

Thermal and optical characterization of collectors integrated in a Sn-DPP based SoCoMo
Author(s): Giovanni Bianucci; Adam Brunton; Gian Luca Cassol; Giorgio Pirovano; Fabio Zocchi; Arnaud Mader; Oliver Franken; Klaus Bergmann; Hans Scheuermann; Peter Zink
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Paper Abstract

The paper presents the results of an investigation into the thermal and optical characteristics of alpha-type dual-mirror grazing incidence collectors for Extreme Ultra-violet Lithography integrated into a tin-fueled discharge produced plasma source. The performance of the system is assessed at various power levels and temperature conditions. The thermal and the optical data, in particular images at extra-focal planes behind the intermediate focus, are compared to the predictions of the thermo-optical model of the system. The data we present provide verification of the models used to design the collector and validation of the thermo-optical modeling approach for design of future generations of collectors.

Paper Details

Date Published: 20 March 2008
PDF: 9 pages
Proc. SPIE 6921, Emerging Lithographic Technologies XII, 692112 (20 March 2008); doi: 10.1117/12.772977
Show Author Affiliations
Giovanni Bianucci, Media Lario Technologies (Italy)
Adam Brunton, Media Lario Technologies (Italy)
Gian Luca Cassol, Media Lario Technologies (Italy)
Giorgio Pirovano, Media Lario Technologies (Italy)
Fabio Zocchi, Media Lario Technologies (Italy)
Arnaud Mader, Philips Extreme UV GmbH (Germany)
Oliver Franken, Fraunhofer-Institut für Lasertechnik (Germany)
Klaus Bergmann, Fraunhofer-Institut für Lasertechnik (Germany)
Hans Scheuermann, Philips Extreme UV GmbH (Germany)
Peter Zink, Philips Extreme UV GmbH (Germany)


Published in SPIE Proceedings Vol. 6921:
Emerging Lithographic Technologies XII
Frank M. Schellenberg, Editor(s)

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