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Proceedings Paper

Device-oriented directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid
Author(s): Ho-Cheol Kim; Joy Cheng; Oun-Ho Park; Sang-Min Park; Charles Rettner
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Paper Abstract

Directed self-assembly (DSA) of a block copolymer containing hybrid material using topographic guiding patterns is presented in this paper. Lamellar microdomains of the hybrid material, which is a mixture of poly(styrene-b-ethylene oxide) (PS-b-PEO) and organosilicate (OS) precursor, have orientational correlation length about five times longer than typical organic block copolymers such as poly(styrene-b-methyl methacrylate) (PS-b-PMMA). The longer correlation length (i.e. bigger grain size) makes it possible to align the lamellar microdomain into geometries similar to device layouts. We report one-dimensional assembly of lamellar microdomains on substrates, which gives crossbar and multifinger nanostructures.

Paper Details

Date Published: 20 March 2008
PDF: 8 pages
Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212B (20 March 2008); doi: 10.1117/12.772723
Show Author Affiliations
Ho-Cheol Kim, IBM Almaden Research Ctr. (United States)
Joy Cheng, IBM Almaden Research Ctr. (United States)
Oun-Ho Park, IBM Almaden Research Ctr. (United States)
Sang-Min Park, IBM Almaden Research Ctr. (United States)
Charles Rettner, IBM Almaden Research Ctr. (United States)


Published in SPIE Proceedings Vol. 6921:
Emerging Lithographic Technologies XII
Frank M. Schellenberg, Editor(s)

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