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Proceedings Paper

Smoothing properties of single and multilayer coatings: a method to smoothen substrates
Author(s): A. J. R. van den Boogaard; E. Louis; E. Zoethout; S. Alonso van der Westen; F. Bijkerk; S. Müllender
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Paper Abstract

In this work we present the smoothing properties of our ion beam smoothened multilayers and, based on the same technology, the extreme smoothing properties in the high and near mid spatial frequency range of a single-material smoothing layer. Coating results of high reflectance multilayers both on rough substrates and on substrates smoothened with silicon bufferlayers are discussed.

Paper Details

Date Published: 26 March 2008
PDF: 6 pages
Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69210R (26 March 2008); doi: 10.1117/12.772479
Show Author Affiliations
A. J. R. van den Boogaard, FOM Institute for Plasma Physics Rijnhuizen (Netherlands)
E. Louis, FOM Institute for Plasma Physics Rijnhuizen (Netherlands)
E. Zoethout, FOM Institute for Plasma Physics Rijnhuizen (Netherlands)
S. Alonso van der Westen, FOM Institute for Plasma Physics Rijnhuizen (Netherlands)
F. Bijkerk, FOM Institute for Plasma Physics Rijnhuizen (Netherlands)
S. Müllender, Carl Zeiss SMT AG (Germany)


Published in SPIE Proceedings Vol. 6921:
Emerging Lithographic Technologies XII
Frank M. Schellenberg, Editor(s)

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