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Proceedings Paper

Intel design for manufacturing and evolution of design rules
Author(s): Clair Webb
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Paper Abstract

The difficult issues in continuing Moore's law with the lack of improvement in lithography resolution are well known.1, 2, 3 Design rules have to change and DFM methodology has to continue to improve to enable Moore's law scaling. This paper will discuss our approach to DFM though co-optimization across design and process. The poly layer is used to show how rules have changed to meet patterning requirements and how co-optimization has been used to define the poly design rules. With the introduction and ramp of several products on our 45nm technology, we have shown our ability to meet the goals of Moore's law scaling at high yields in volume manufacturing on a two year cycle.

Paper Details

Date Published: 20 March 2008
PDF: 8 pages
Proc. SPIE 6925, Design for Manufacturability through Design-Process Integration II, 692503 (20 March 2008); doi: 10.1117/12.772052
Show Author Affiliations
Clair Webb, Intel (United States)

Published in SPIE Proceedings Vol. 6925:
Design for Manufacturability through Design-Process Integration II
Vivek K. Singh; Michael L. Rieger, Editor(s)

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