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Proceedings Paper

Lot acceptance sampling inspection plan for non-normal CD distribution
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Paper Abstract

The optimizing of sampling plans for process control and lot acceptance inspections is emerging as an important subject concerning the recent lithography process. With proper acceptance variables, one can reduce sample size using inspection by variables rather than inspection by attributes. The inspection by variables is cost-effective and desirable. However, it is difficult to apply to a non-normal population. Many cases exist where CD distribution cannot be regarded as normal. If one applies the acceptance sampling inspection with conventional acceptance variables@in those cases, the inspections become tighter or are reduced, which is contrary to expectations. The problem of non-normality, which is an essential property of CD distributions, should be treated extensively. We found that the above problem can be overcome by modifying the conventional acceptance variables through the inclusion of the 3rd moment. As a result, 50% reduction of sample size can be realized by introducing the lot acceptance sampling with new variables.

Paper Details

Date Published: 22 March 2008
PDF: 8 pages
Proc. SPIE 6922, Metrology, Inspection, and Process Control for Microlithography XXII, 692214 (22 March 2008); doi: 10.1117/12.771878
Show Author Affiliations
Takahiro Ikeda, Toshiba Corp. (Japan)
Masafumi Asano, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 6922:
Metrology, Inspection, and Process Control for Microlithography XXII
John A. Allgair; Christopher J. Raymond, Editor(s)

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