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Proceedings Paper

Polarization characteristics of state-of-art lithography optics reconstructed from on-body measurement
Author(s): Toru Fujii; Jun Kogo; Kosuke Suzuki; Masayasu Sawada
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Paper Abstract

In hyper-NA imaging, the vector properties of the light become important. Therefore, to characterize and to fully exploit the state-of-the-art lithographic apparatus, reconstruction of polarization matrices in the pupil plain of a projection lens has become indispensable. We will present a reconstructed Jones matrix of a benchtest projection optic. The reconstruction method is based on the concept of the first canonical coordinate of the Lie group, which conjures up a geometrical approach. The Jones matrix of this benchtest immersion projection lens is successfully reconstructed using the data obtained by an on-body tool called iPot. A reconstructed polarized wavefront and polarized wavefront measured by iPot agree very well. This newly developed methodology is essential to capturing the nature of light transformations in the hyper-NA projection lenses. It is of fundamental importance to quantifying the properties of the state-of-the-art projection lenses used in lithography.

Paper Details

Date Published: 7 March 2008
PDF: 12 pages
Proc. SPIE 6924, Optical Microlithography XXI, 69240Z (7 March 2008); doi: 10.1117/12.771812
Show Author Affiliations
Toru Fujii, Nikon Corp. (Japan)
Jun Kogo, Nikon Corp. (Japan)
Kosuke Suzuki, Nikon Corp. (Japan)
Masayasu Sawada, Nikon System (Japan)

Published in SPIE Proceedings Vol. 6924:
Optical Microlithography XXI
Harry J. Levinson; Mircea V. Dusa, Editor(s)

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