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Proceedings Paper

Characteristics of a minimum-debris optimum conversion efficiency tin-based LPP source
Author(s): Bob Rollinger; Davide Bleiner; Ndaona Chokani; Reza S. Abhari
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Paper Abstract

The conversion efficiency and potential for debris of planar and spherical targets of laser-produced tin-plasmas for use in a high-volume manufacturing EUVL source collector module are computationally examined. A Nd:YAG laser beam is used to irradiate the targets under different irradiances and pulse durations. A two-dimensional/axisymmetric hydrodynamic code, an atomic physics code and an analytical model are used to perform simulations of the laser-plasma processes. The predicted conversion efficiencies are in good agreement with data reported from experiments. The optimum laser parameters yield maximum conversion efficiencies of 1.86% and 1.45%, respectively for the planar and spherical targets. However, the spherical target is best suited for low cost-of-ownership, as it has significantly lower neutral debris compared to the planar target. The key finding of this work is that the laser produced plasmas of both planar and spherical targets are non-uniform. These non-uniformities must be accounted for in the design of collection optics and debris mitigation schemes.

Paper Details

Date Published: 27 March 2008
PDF: 12 pages
Proc. SPIE 6921, Emerging Lithographic Technologies XII, 692110 (27 March 2008); doi: 10.1117/12.771641
Show Author Affiliations
Bob Rollinger, ETH Zurich (Switzerland)
Davide Bleiner, ETH Zurich (Switzerland)
Ndaona Chokani, ETH Zurich (Switzerland)
Reza S. Abhari, ETH Zurich (Switzerland)


Published in SPIE Proceedings Vol. 6921:
Emerging Lithographic Technologies XII
Frank M. Schellenberg, Editor(s)

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