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Proceedings Paper

A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging
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Paper Abstract

This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.

Paper Details

Date Published: 8 February 2008
PDF: 10 pages
Proc. SPIE 6888, MEMS Adaptive Optics II, 68880V (8 February 2008); doi: 10.1117/12.770620
Show Author Affiliations
S. A. Cornelissen, Boston Micromachines Corp. (United States)
P. A. Bierden, Boston Micromachines Corp. (United States)
T. G. Bifano, Boston Micromachines Corp. (United States)
Boston Univ. (United States)

Published in SPIE Proceedings Vol. 6888:
MEMS Adaptive Optics II
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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