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Proceedings Paper

Closed-loop AO demonstration of MEMS SLM with piston, tip and tilt control
Author(s): Harold Dyson; Flavio Pardo; Roland Ryf; Vladimir Aksyuk; Robert Frahm; Arman Gasparyan; Rick Papazian; David Ramsey; Maria Elina Simon; Susanne Arney
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Paper Abstract

A MEMS SLM with an array of 64×64 pixels, each 120 μm ×120 μm in size, with 98% fill-factor, has been developed. Each reflector in the array is capable of 5 μm of stroke, and ±4° tip and tilt. From a prototype array, 14 contiguous pixels have been independently wired-out to off-chip drive electronics. These 14 pixels have been demonstrated to be effective in an off-the-shelf AO system (with requisite modifications to suit the SLM). For a low-order static aberration, the measured Strehl ratio has been improved from 0.069 to 0.861, a factor of 12 improvement.

Paper Details

Date Published: 8 February 2008
PDF: 6 pages
Proc. SPIE 6888, MEMS Adaptive Optics II, 68880T (8 February 2008); doi: 10.1117/12.770432
Show Author Affiliations
Harold Dyson, Alcatel-Lucent (United States)
Flavio Pardo, Alcatel-Lucent (United States)
Roland Ryf, Alcatel-Lucent (United States)
Vladimir Aksyuk, Alcatel-Lucent (United States)
Robert Frahm, Alcatel-Lucent (United States)
Arman Gasparyan, Alcatel-Lucent (United States)
Rick Papazian, Alcatel-Lucent (United States)
David Ramsey, Alcatel-Lucent (United States)
Maria Elina Simon, Alcatel-Lucent (United States)
Susanne Arney, Alcatel-Lucent (United States)


Published in SPIE Proceedings Vol. 6888:
MEMS Adaptive Optics II
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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