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Proceedings Paper

Microtransfer molding of SU-8 micro-optics
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Paper Abstract

SU-8 is a very promising polymer for micro-optics. It is mechanically robust with high thermal and chemical resistance, has high transmission at visible and near-infrared wavelengths, and has relatively high refractive index after curing. While lithographic patterning of SU-8 is relatively common, molding of SU-8 is more difficult due to challenges with solvent removal and cross linking. In this paper, we discuss techniques for micromolding of micro- and nano-optics in SU-8. Elastomeric mold templates are first cast from master structures fabricated using standard techniques. The elastomeric templates are then used in low pressure molding processes to produce high-fidelity refractive and diffractive micro-optics in SU-8. The use of the elastomeric replica mold enables realization of a wider variety of optical surfaces than can be achieved with conventional lithographic patterning in SU-8, and further enables conformal fabrication of SU-8 micro-optics on non-planar surfaces. Molding processes and experimental results for both thin (diffractive) and thick (refractive) elements are presented. Replication of SU-8 micro-optics on both planar and non-planar surfaces, and hybrid processes combining molding and lithographic exposure are demonstrated.

Paper Details

Date Published: 6 February 2008
PDF: 9 pages
Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 68830C (6 February 2008); doi: 10.1117/12.769694
Show Author Affiliations
A. Cannistra, Univ. of North Carolina at Charlotte (United States)
P. Srinivasan, College of Optics and Photonics, Univ. of Central Florida (United States)
E. G. Johnson, Univ. of North Carolina at Charlotte (United States)
T. J. Suleski, Univ. of North Carolina at Charlotte (United States)

Published in SPIE Proceedings Vol. 6883:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, Editor(s)

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