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Proceedings Paper

Defect reduction using new digital valve dispensing technology
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Paper Abstract

Defectivity requirements are constantly put to new standards, even in older factories where new toolsets aren't a feasible alternative. To prolong the life of this equipment, Integrated Designs has created the digital dispense valve system. Tracks with older pump systems are plagued with repeatability and suckback issues that are key factors in eliminating or reducing defectivity. The digital dispense system not only increases the pump's capability to hold suckback across significant amounts of idle time regardless of viscosity, but also allows for lower dispense volumes due to more repeatable dispenses. Combining these factors results in a significant decrease in defectivity with only minor equipment additions, that previously would have required costly pump and track upgrades.

Paper Details

Date Published: 26 March 2008
PDF: 11 pages
Proc. SPIE 6923, Advances in Resist Materials and Processing Technology XXV, 69233T (26 March 2008); doi: 10.1117/12.768951
Show Author Affiliations
Garrett Standley, Freescale Semiconductor (United States)
John Kasson, Freescale Semiconductor (United States)
Brian Kidd, Integrated Designs, Inc. (United States)


Published in SPIE Proceedings Vol. 6923:
Advances in Resist Materials and Processing Technology XXV
Clifford L. Henderson, Editor(s)

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