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Proceedings Paper

Multiple phase-shifting white-light interferometry for quantitative detection
Author(s): Tomotake Terasawa; Atsushi Wada; Yukihiro Ishii
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Paper Abstract

The conventional phase-shifting interferometry (PSI) algorithm used in white-light phase-shifting interferometry (WLPSI) is not effective for the steep envelope change in the interferogram. We have developed a new 7-step algorithm that is insensitive to the steep contrast change in the envelope of interferogram. Seven-step algorithm includes the envelope change in the interferogram is approximated to be a parabolic function. The detection accuracy of the contrast peak and the accuracy in phase-extraction routine of a 7-step algorithm have been compared with those of a 5-step algorithm.

Paper Details

Date Published: 24 January 2008
PDF: 11 pages
Proc. SPIE 6829, Advanced Materials and Devices for Sensing and Imaging III, 682928 (24 January 2008); doi: 10.1117/12.768580
Show Author Affiliations
Tomotake Terasawa, Tokyo Univ. of Science (Japan)
Atsushi Wada, Tokyo Univ. of Science (Japan)
Yukihiro Ishii, Tokyo Univ. of Science (Japan)

Published in SPIE Proceedings Vol. 6829:
Advanced Materials and Devices for Sensing and Imaging III
Anbo Wang; Yimo Zhang; Yukihiro Ishii, Editor(s)

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