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Proceedings Paper

Femtosecond laser for black silicon and photovoltaic cells
Author(s): T. Sarnet; M. Halbwax; R. Torres; P. Delaporte; M. Sentis; S. Martinuzzi; V. Vervisch; F. Torregrosa; H. Etienne; L. Roux; S. Bastide
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Paper Abstract

We have prepared absorbing structures for photovoltaic cells with different nano-texturization, obtained by means of a femtosecond laser, without the use of corrosive gas (i.e. under vacuum). To take in account the 3D structured front surface, the emitter doping has been realized by using Plasma Immersion Ion Implantation (so-called PULSION). The results show a photocurrent increase up to 60 % in the laser texturized zones.

Paper Details

Date Published: 15 February 2008
PDF: 15 pages
Proc. SPIE 6881, Commercial and Biomedical Applications of Ultrafast Lasers VIII, 688119 (15 February 2008); doi: 10.1117/12.768516
Show Author Affiliations
T. Sarnet, LP3 (France)
M. Halbwax, ICMPE (France)
R. Torres, LP3 (France)
P. Delaporte, LP3 (France)
M. Sentis, LP3 (France)
S. Martinuzzi, TECSEN (France)
V. Vervisch, IBS (France)
F. Torregrosa, IBS (France)
H. Etienne, IBS (France)
L. Roux, IBS (France)
S. Bastide, ICMPE (France)

Published in SPIE Proceedings Vol. 6881:
Commercial and Biomedical Applications of Ultrafast Lasers VIII
Joseph Neev; Stefan Nolte; Alexander Heisterkamp; Christopher B. Schaffer, Editor(s)

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