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Proceedings Paper

High-speed and large-scale electromagnetically actuated MEMS scanning-mirror
Author(s): Canjun Mu; Feiling Zhang; Yaming Wu
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Paper Abstract

Large-scale micro-electromechanical systems (MEMS) scanning mirrors play a primary role in many fields of manipulating light beam scanning, such as rapid optical spectrum analyzers (OSAs) based on dispersive gratings using in near infrared (NIR) region. According to the applications, a high speed electromagnetically actuated MEMS scanning mirror with large mirror area of 9×6mm2 has been developed. The MEMS scanning mirror chip, which is fabricated using bulk silicon micromachining process and electroplating technique, is immersed in a constant 365 mT magnetic field parallel to the coil plane and generates the maximum optical deflection angle of ±11.15° at the 1.39 kHz resonant frequency. The quality factor, Q, of 77 is achieved in air corresponding to a low power consumption of 102.6 mW. In addition, the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity at the wavelength of 1550nm is high up to 87%. The results show that the device is adequate for mm-sized scanning systems and compatible with smart OSAs applications.

Paper Details

Date Published: 4 January 2008
PDF: 10 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683609 (4 January 2008); doi: 10.1117/12.768475
Show Author Affiliations
Canjun Mu, Shanghai Institute of Microsystem and Information Technology (China)
Graduate School of the Chinese Academy of Sciences (China)
Feiling Zhang, Spansion Co., Ltd. (China)
Yaming Wu, Shanghai Institute of Microsystem and Information Technology (China)


Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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