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Proceedings Paper

Particle-contamination analysis for reticles in carrier inner pods
Author(s): John R. Torczynski; Michael A. Gallis; Daniel J. Rader
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Paper Abstract

Particle contamination is analyzed for a reticle in the inner pod of a carrier with particular emphasis on the effect of raising the cover of the inner pod before removing the reticle from the carrier at atmospheric pressure (not low pressure). Two mechanisms for particle transport into the gap between the base plate and the reticle are considered: injection and advection-diffusion. It is shown that injection is not an important mechanism but that advection-diffusion transport can carry particles deeply into the gap, where they can deposit on the reticle surface. Closed-form expressions are presented for the transmission probability that particles at the reticle edge are transported inward past the exclusion zone around the reticle perimeter. The gas flow in the gap that occurs during cover-raising is found by numerical simulation, and the closed-form expressions are applied to determine the probability of contamination for different cover-raising scenarios.

Paper Details

Date Published: 21 March 2008
PDF: 11 pages
Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69213G (21 March 2008); doi: 10.1117/12.768409
Show Author Affiliations
John R. Torczynski, Sandia National Labs. (United States)
Michael A. Gallis, Sandia National Labs. (United States)
Daniel J. Rader, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 6921:
Emerging Lithographic Technologies XII
Frank M. Schellenberg, Editor(s)

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