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Proceedings Paper

Self-assembled single-digit micro-display on plastic
Author(s): Ehsan Saeedi; Samuel Kim; Harvey Ho; Babak A. Parviz
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Paper Abstract

We present the design and construction of a micro-display consisting of independently microfabricated light emitting diodes (LEDs) and silicon transistors on unconventional substrates such as flexible plastics. The fabrication process takes advantage of self-assembly to form the display. Silicon microcomponents and AlGaAs red LEDs were microfabricated and released to form a powder-like collection of parts. A plastic template containing binding sites was independently microfabricated. Each binding site on the template consisted of a well with a shape complementary to that of the released component. Self-assembly process was conducted in a fluidic medium to allow the microcomponents to assemble in proper receptor sites on the flexible template. We showed self-assembly of both LEDs and driving circuitry for display on plastic template. We got more than 90% yield for physically positioning the parts on template, with electrical connection yield of 62%.

Paper Details

Date Published: 6 February 2008
PDF: 12 pages
Proc. SPIE 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688509 (6 February 2008); doi: 10.1117/12.768289
Show Author Affiliations
Ehsan Saeedi, Univ. of Washington (United States)
Samuel Kim, Univ. of Washington (United States)
Harvey Ho, Univ. of Washington (United States)
Babak A. Parviz, Univ. of Washington (United States)


Published in SPIE Proceedings Vol. 6885:
MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
Srinivas A. Tadigadapa; Babak A. Parviz; Albert K. Henning, Editor(s)

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