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Proceedings Paper

Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source
Author(s): D. Nakamura; K. Tamaru; T. Akiyama; A. Takahashi; T. Okada
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Paper Abstract

The results of a comparative investigation on the emission characteristics of debris from CO2 laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitted from tin plasma produced by a CO2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. The large size of droplets was also observed by silicon substrates as witness plates. A higher ion kinetic energy and lower debris emission in the case of CO2 laser in compared with Nd: YAG laser for the same laser energy of ~50 mJ. In addition, the dynamics of the neutral atoms and the irradiated target from an Nd:YAG laser-produced tin plasma with a mass-limited micro-droplet target were investigated by imaging techniques.

Paper Details

Date Published: 14 February 2008
PDF: 9 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687909 (14 February 2008); doi: 10.1117/12.767894
Show Author Affiliations
D. Nakamura, Kyushu Univ. (Japan)
K. Tamaru, Kyushu Univ. (Japan)
T. Akiyama, Kyushu Univ. (Japan)
A. Takahashi, Kyushu Univ. (Japan)
T. Okada, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Frank Träger; Jan J. Dubowski; Andrew S. Holmes; Michel Meunier; Craig B. Arnold; Hiroyuki Niino, Editor(s)

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