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Proceedings Paper

An optical scanner based on cantilever-type electrostatic zipping actuators
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Paper Abstract

This paper discusses modeling, design, fabrication and characterization of an optical scanner based on cantilever-type electrostatic zipping actuators. The electrostatic actuator has been designed to achieve high displacements for large optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using multi-layer polysilicon foundry fabrication processes. The electrostatic force between the cantilever and the bottom electrode on the substrate pulls the cantilever down. With a warped cantilever, the force closes the gap from the anchored end and gradually the zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical shortcircuit. With various annealing temperatures, the warped angles are controllable. The cantilever serves as a reflective surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning applications. In this paper we present the design considerations in electrostatic zipping actuator displacement and control as well as the arrangement for optical scanning.

Paper Details

Date Published: 4 January 2008
PDF: 8 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683617 (4 January 2008); doi: 10.1117/12.767801
Show Author Affiliations
Smitha M. N. Rao, The Univ. of Texas at Arlington (United States)
Praveen Pandojirao-Sunkojirao, The Univ. of Texas at Arlington (United States)
Naresh Dhaubanjar, The Univ. of Texas at Arlington (United States)
Mu Chiao, The Univ. of British Columbia (Canada)
J.-C. Chiao, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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